| 摘要 |
PROBLEM TO BE SOLVED: To improve process efficiency while securing appropriate process operations. SOLUTION: A movable carrier unit 24 is provided over each process part of a process unit part 20, and both end edge parts of a substrate B are supported by support members 35a, 35b of a hand member 34 mounted to this carrier unit 24 to carry the substrate B between the respective process parts. Further, a projection is provided on a face of each of the support members 35a, 35b to receive the substrate B. Three projections are respectively provided in each of the support members 35a, 35b, and in a line at equal intervals in a longitudinal direction of each of the support members 35a, 35b, and in dimensions of each projection, a projection 37 midway in a longitudinal direction of each of the support members 35a, 35b is slightly longer than a projection 36 on the both sides. |
