| 摘要 |
PROBLEM TO BE SOLVED: To detect a surface scratch in a pattern which has not been able to be detected by a conventional system by increasing the number of scratch types which can be detected or distinguished. SOLUTION: The characteristics of ellipso parameters (Ψ,Δ) of surface reflection light are obtained in advance by applying polarization to a sample with a surface scratch (a) and the ellipso parameters (Ψ,Δ) of the surface reflection light are obtained by applying polarization to a surface to be inspected of a sample to be inspected (b). The ellipso parameters (Ψ,Δ) obtained in (c), (b) are compared with the ellipso parameters (Ψ,Δ) in (a), and the grade of the surface scratch is set based on the result obtained in (c) (d).
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