发明名称 BONDING DEVICE HAVING MOVABLE TRANSFER PART
摘要 PROBLEM TO BE SOLVED: To enable the required time from pick and place of a chip to bonding part to be cut down by individually and movably providing the transfer part such as paste, etc., in a chip holding state from the position near the pick and place part of the chip to the position beneath a bonding tool. SOLUTION: The title bonding device is provided with a chip feeder 5, a transfer part 7 such as paste, etc., a pick and place part 6 delivering the chip from a chip feeder 5 to the transfer part 7 and a bonding part 8. In such a bonding device, the transfer device, the transfer part 7 such as paste, etc., in the chip holding state is to be individually and movably provided from the position near the pick and place part 6 to the position beneath a bonding tool 15. For example, the paste transfer part 7 preparing transfer paste in the state of holding a chip on a transfer table 19 having a squeegee is movably fitted to a chip carrier guide 12 along the same 12.
申请公布号 JPH09129658(A) 申请公布日期 1997.05.16
申请号 JP19950309988 申请日期 1995.11.02
申请人 SHIBUYA KOGYO CO LTD 发明人 TERADA TORU
分类号 H01L21/60;H01L21/52;(IPC1-7):H01L21/52 主分类号 H01L21/60
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