| 摘要 |
PROBLEM TO BE SOLVED: To prevent adverse effects on a substrate under processing even when an alarm is generated from a processing unit. SOLUTION: When any processing unit in a plurality of processing units generates an alarm for notifying abnormality, processing and conveyance are continued until a carrier path is completed for a substrate, which is located at the downstream side from an alarm generating unit of a specified skip-mode unit in the carrier path. In the meantime, the conveyance is stopped for the substrate, which is located at the upstream side or the alarm generating unit or the unit for the skip mode. |
