METHOD AND DEVICE FOR SURFACE TREATMENT,申请号JP19950285996-传众专利搜索

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发明名称	METHOD AND DEVICE FOR SURFACE TREATMENT
摘要
申请公布号	JPH09129608(A)	申请公布日期	1997.05.16
申请号	JP19950285996	申请日期	1995.11.02
申请人	TOSHIBA CORP	发明人	HAYASHI HISATAKA
分类号	C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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