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发明名称
PLASMA ETCHING METHOD
摘要
申请公布号
JPH09129595(A)
申请公布日期
1997.05.16
申请号
JP19950279070
申请日期
1995.10.26
申请人
APPLIED MATERIALS INC
发明人
ISHIKAWA YOSHIO;IIJIMA YUKIO;OKANO HARUO
分类号
H05H1/46;C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H05H1/46
代理机构
代理人
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