| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electrostatic chuck which is provided with a temperature control system with which approximately constant temperature is maintained over an substrate, especially along the periphery part of it, for improved corrosion resistance and reduced fault rate. SOLUTION: By applying a voltage from an electrostatic member 35 to an electrode 40, a substrate 30 is held on a conformal contact surface 50, thus, a periphery part containing a leaking part 115 where a thermal conductive fluid leaks and a sealing part which prevents the thermal conductive fluid actually leaking is configured. A flow rate regulator 35 which makes the thermal conductive fluid of different flow rate flow through a conduit 105 of the electrostatic member 35 is provided, and so that an approximately constant temperature is maintained over the substrate 30 held above a chuck 20, the first thermal conductive fluid flow-rate passes through the conduit near the sealing part of a periphery part 110 of the electrostatic member 35 (i) and the second thermal conductive fluid flow-rate larger than the first flow rate passing through the conduit 105 near the leaking part 115 (ii) are supplied.</p> |
