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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH09129750(A)
申请公布日期
1997.05.16
申请号
JP19950310054
申请日期
1995.11.02
申请人
SONY CORP
发明人
ICHIKAWA TSUTOMU
分类号
H01L21/66;H01L21/822;H01L21/8238;H01L27/04;H01L27/092;(IPC1-7):H01L21/823
主分类号
H01L21/66
代理机构
代理人
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