| 摘要 |
PROBLEM TO BE SOLVED: To ease the impact in the case where a mass section displaces greatly to collide against another portion for preventing the breakage of a supporting beam by providing a shock easing stopper for easing the movement of the mass section before a movable electrode and a fixed electrode collide mutually. SOLUTION: A shock easing stopper 40 is composed of a thin plate-shaped shock easing beam part 41 in which base end sides are located on both the right and left sides of a supporting section 35, and the free end extends toward a mass part 37 in parallel to a supporting beam 36, and another thin plate-shaped shock easing beam part 42 which separates as far as separating dimension (dA4) from the beam part 41, and has base end parts located on both the right and left sides of the mass section 37 and the free end extending toward the supporting section in parallel to the supporting beam 36. Since the separated dimension dA4 between the beam sections 41, 42 is smaller than a separated dimension dA1 between a fixed electrode 33A and a movable electrode 37A, before the mass section 37 displaces greatly in a direction shown by arrow A to bring the electrode 37a into contact with the electrode 33a, two pairs of beam parts 41, 42 come into contact with each other, and shock caused at the time of their contact is eased by the deflection of the beam parts 41, 42, and the forced deflection and resultant breakdown of the supporting beam 36 are therefore prevented. |
