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发明名称
BURN-IN METHOD AND DEVICE THEREFOR
摘要
申请公布号
JPH09127189(A)
申请公布日期
1997.05.16
申请号
JP19950280179
申请日期
1995.10.27
申请人
HITACHI LTD
发明人
FUKAZAWA HIROSHI;HARADA SHOICHIRO
分类号
G01R31/26;H01L21/66;(IPC1-7):G01R31/26
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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