| 摘要 |
PROBLEM TO BE SOLVED: To enable a thin film inductor to be lessened in conductor resistance and loss and enhanced in high-frequency characteristics by a method wherein metal is deposited like a film on an insulating board where a specific recessed plane of the same dimensions with a spiral conductor path is formed, and a recessed spiral conductor on the insulating board is formed into a spiral conductor thick film through a lithography technique. SOLUTION: Photosensitive resin is applied onto the surface of an insulating board 1, the board 1 is pre-baked, and a mask of the same dimensions with a spiral conductor path 3 is previously formed and made to overlap the surface of the pre-baked photosensitive resin. Thereafter, the insulating board 1 is exposed to light through an exposure system, developed, post-cured, etched, cleaned to remove resin, and rinsed with water, whereby a recessed spiral groove 2 is formed on the surface of the board 1 as deep as 1μm to 10.0μm by etching, and then metal is deposited like a film on the board 1 through a sputtering method. In succession, photosensitive resin is applied onto the board 1, pre-baked, exposed to light, developed, post-cured, and etching, whereby a spiral conductor thick film is formed.
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