| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce the weight of a movable stage without lowering the rigidity and make it move at high speed and high accuracy by adopting a contactless air bearing and making an air pad of ceramic for guiding the bearing in a moving direction and supporting it vertically as well as making the entire movable stage. SOLUTION: A motor fixed to a Y-stage 10 is driven to rotate a ball screw 5 through a coupling 7 to feed fore and back a ball nut 5 meshed with the screw 5, thereby moving a fixed X-stage 2 fore and back in the X-direction. The stage 2 has an air pad 25 to guide in the X-direction and air pad to support in the Z-direction and the stage 2 moves on planes 19 and 20 to shift in a horizontal plane without a slightest motion in the Z-direction, while being regulated by a guide 9 in the Y-direction.</p> |
