| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve the carrying and storing of flat parts by forming parts- taking in/out openings at a storing part to house flat parts and moving them between a first position for taking in/out the flat parts and second position for fixing them by stoppers. SOLUTION: A containing part 30 to house wafers 40 has magnetic stoppers 50 and 52 at an opening 44 and stoppers 54 and 56 at another opening 46 thereof. Leaf springs 70, 72, 74 and 76 pushing the stoppers to the centers of the openings 44 and 46 are fixed to the side walls 32 and 34 and electromagnets 80, 82, 84 and 86 are fixed to the outer surfaces of the side walls. While those magnets remain energized, the stoppers 50-56 are pushed by the springs 70-76 to fix the wafers 40. To take in/out the wafer through the opening 44, the magnets 80 and 82 are energized to move the stoppers 50 and 52 to the electromagnets 80 and 82 against the springs 70 and 72.</p> |
