ELECTRON EMITTING ELEMENT AND MANUFACTURE THEREOF

摘要

PROBLEM TO BE SOLVED: To unify the emission current from emitters and suppress an overcurrent. SOLUTION: This element is provided with multiple emitters formed on a base electrode 2 via a resistive layer 6 and a gate electrode 3 arranged at a fine gap to surround the emitters 7 laminated on the base electrode 2 via an insulating layer 4. When a voltage is applied between the base electrode 2 and the gate electrode 3, electrons are emitted from the emitters 7 by the strong electric field formed between the gate electrode 3 and the emitters 7. A small hole 6a is provided on the resistive layer 6 from the emitters 7 side to the base electrode 2 side so that the cross sectional area of the resistive layer 6 is decreased and the resistance value is set to a prescribed value. The same filling member 9 as the member forming the insulating layer 4 is filled in the small hole 6a provided on the resistive layer 6.