| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent the stripe-shaped edge part of the pigment pattern of a color filter from being detected as a pseudo defect. SOLUTION: While a stage 2, where an inspection object is placed, is rotated by 360 deg. while maintaining the level of the horizontal surface, continuous inspection by the reflection light of the light from a light source 1 is performed. At that time, only scratches and irregular defects are detected by preventing a repetitive pattern being universally detected in a color filter 3 for liquid crystal display to be inspected from being recognized as pseudo defects.</p> |
