TRAGBARE ABDICHTBARE UNTER DRUCK STEHENDE BEHÄLTERN ZUM SPEICHERN VON HALBLEITERWAFERN IN EINER SCHÜTZENDEN GASARTIGEN UMGEBUNG,申请号AT19920480109T-传众专利搜索

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发明名称	TRAGBARE ABDICHTBARE UNTER DRUCK STEHENDE BEHÄLTERN ZUM SPEICHERN VON HALBLEITERWAFERN IN EINER SCHÜTZENDEN GASARTIGEN UMGEBUNG
摘要
申请公布号	AT152286(T)	申请公布日期	1997.05.15
申请号	AT19920480109T	申请日期	1992.08.04
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	GARRIC, GEORGES;LAFOND, ANDRE
分类号	B65G49/07;G03F7/20;H01L21/673;H01L21/677;H05K5/06;(IPC1-7):H01L21/00	主分类号	B65G49/07
代理机构		代理人
主权项
地址

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