| 摘要 |
<p>This apparatus is provided with an outer hollow electrode (12) formed so as to house a container (20) therein and having a hollow which has a cross-sectional shape substantially similar to that of the container, an outer electrode insulating plate (11) which a mouth portion of the container contacts when the container is housed in the hollow of the outer electrode, an inner electrode (16) inserted from the mouth portion of the container, which is housed in the hollow of the outer electrode, into the interior thereof, a gas discharge means communicating with the hollow of the outer electrode and adapted to discharge the gas from the same hollow, a means for supplying a raw material gas to the interior of the container housed in the hollow of the outer electrode, and a high-frequency power source (14) connected to the outer electrode, the container being housed in the hollow of the outer electrode with the outer electrode insulated by the insulating member, the inner electrode being inserted into the container and grounded, the interior of the hollow of the outer electrode being evacuated, a raw material gas being supplied to the interior of the container housed in the same hollow, a carbon film coating operation being then carried out with a high-frequency wave applied to the outer electrode. <IMAGE></p> |
