METHOD OF MANUFACTURING A COMPOSITE STRUCTURE FOR USE IN ELECTRONIC DEVICES AND STRUCTURE, MANUFACTURED BY SAID METHOD

摘要

A method for manufacturing of a composite microelectronic structure with improved planarity of layers thereof. The method comprises masking of selected portion of electrically conductive layers with subsequent selective electrochemical anodic oxidation thereof and removing the mask. A composite structure, in particular MCM-D's manufactured by this method has improved connectivity density and performances.