| 摘要 |
An illuminating apparatus for manufacturing a nozzle plate used for ink-jet printers is disclosed. This illuminating apparatus exposes two workpieces to light through a mask on which two mask patterns having nozzle-hole strings are formed to form nozzle-hole strings on the two workpieces at the same time. This illuminating apparatus comprises an Excimer laser, a pair of prisms for dividing light emitted from the laser into three beams of luminous flux on a first plane including the optical axis and for directing the three beams of luminous flux in different directions so that they intersect at a first position, and a pair of prisms for dividing each of the three beams of luminous flux, which intersect at the first position, into two segments on a second plane including the optical axis and perpendicular to the first plane and for directing the two segments in different directions so that the two segments intersect at a second position. The apparatus further comprises a cylindrical lens having a refractive power only on the first plane and a lens system having the same refractive power on both the first and the second planes. The cylindrical lens brings the three beams of luminous flux into focus on the plane perpendicular to the optical axis and disposed at the second position, and the lens system superimposes the three beams of luminous flux emitted from the plane on the mask (substrate) and brings them into focus on the mask in the second plane. The three beams of luminous flux overlap with each other for each segment and the two line-shaped illuminated areas corresponding to the two mask patterns are formed on the mask at the same time. Therefore, one mask pattern (nozzle-hole string) is illuminated by one line-shaped light beam at the same time when the other mask pattern (nozzle-hole string) is illuminated by the other line-shaped light beam. <IMAGE> |
