Patterning material and patterning method

摘要

A patterning material includes a polymer represented by a general formula: <CHEM> wherein R1 indicates a hydrogen atom or an alkyl group; R2 indicates a hydrophobic protecting group which is easily desorbed through a function of an acid; R3 indicates a hydrogen atom or an alkyl group; R4 and R5 independently indicate a hydrogen atom, an alkyl group, a phenyl group or an alkenyl group, or together indicate a cyclic alkyl group, a cyclic alkenyl group or a cyclic alkyl or alkenyl group having a phenyl group; x satisfies a relationship of 0 < x < 1; and y satisfies a relationship of 0 < y < 1. <IMAGE>