发明名称 LASER STRIPPING IMPROVEMENT BY MODIFIED GAS COMPOSITION
摘要 A method and apparatus for accelerating a laser stripping process carried out in a reactive gas mixture, comprising carrying out the stripping process in the presence of an accelerating effective amount of NxOy gas.
申请公布号 WO9717166(A1) 申请公布日期 1997.05.15
申请号 WO1996IL00138 申请日期 1996.11.04
申请人 ORAMIR SEMICONDUCTOR EQUIPMENT LTD.;LIVSHITS (BUYANER), BORIS;GENUT, MENACHEM;TEHAR-ZAHAV, OFER 发明人 LIVSHITS (BUYANER), BORIS;GENUT, MENACHEM;TEHAR-ZAHAV, OFER
分类号 B23K26/12;G03F7/42;H01L21/027;H01L21/302;H01L21/3065;(IPC1-7):B23K26/12 主分类号 B23K26/12
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