Micro-machined sensor

摘要

This micro-machined measurement cell (sensor) is intended to be mounted on a substrate (support) and includes a measurement sensor (121) and a mounting structure (120) which are separate from each other and joined to each other by a connecting arm (128). At least one element (103b) of the mounting structure, one element (133) of the connection arm and one element (103a) of the sensor being made in a single piece. The mounting structure (120) of this measurement cell preferably has the form of a frame surrounding the sensor (121).