| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for machining a substrate capable of suppressing the temperature rise of the cooling water, and keeping the output of the CO2 gas laser beam to be constant. SOLUTION: In a substrate machining method using the CO2 gas laser beam, 4-20% of the CO2 gas laser beam A outputted from a resonator 4a on the output side is reflected by a mirror 10 for detecting the monitor beam which is provided in a tilted manner relative to the optical axis between the resonator 4a and a condensing lens 17, and a substrate 19 is machined while the CO2 gas laser beam R which is reflected on the surface of the mirror 10 for detecting the monitor beam is constantly monitored by a monitor beam detecting means 11. |
