发明名称 |
Surfactant-enhanced epitaxy |
摘要 |
The present invention broadly concerns layered structures of substantially-crystalline materials and processes for making such structures. More particularly, the invention concerns epitaxial growth of a substantially-crystalline layer of a first material on a substantially-crystalline second material different from the first material utilizing an approximately one monolayer thick monovalent surfactant element.
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申请公布号 |
US5628834(A) |
申请公布日期 |
1997.05.13 |
申请号 |
US19950438004 |
申请日期 |
1995.05.09 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
COPEL, MATTHEW W.;TROMP, RUDOLF M. |
分类号 |
C30B23/02;C30B25/02;C30B25/18;(IPC1-7):H01L21/203;H01L29/165 |
主分类号 |
C30B23/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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