发明名称 Surfactant-enhanced epitaxy
摘要 The present invention broadly concerns layered structures of substantially-crystalline materials and processes for making such structures. More particularly, the invention concerns epitaxial growth of a substantially-crystalline layer of a first material on a substantially-crystalline second material different from the first material utilizing an approximately one monolayer thick monovalent surfactant element.
申请公布号 US5628834(A) 申请公布日期 1997.05.13
申请号 US19950438004 申请日期 1995.05.09
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 COPEL, MATTHEW W.;TROMP, RUDOLF M.
分类号 C30B23/02;C30B25/02;C30B25/18;(IPC1-7):H01L21/203;H01L29/165 主分类号 C30B23/02
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