Miniature linear motion actuator

摘要

A linear actuator device. A first mode of operation uses a single clamping technique whereby a piezoelectric element is slowly expanded, in a way such that a clamping force between that element and its base holds it in place. The piezoelectric element is then contracted in size very quickly, and the inertia created by that action overcomes the clamping force and moves relative to the base. A second mode uses a double clamping technique where first the rear is clamped and the front moved forward then the front is clamped and the rear moved forward. All of these embodiments preferably use semiconductor materials, enabling formation of very thin layers and small devices.