发明名称 FILTER UNIT
摘要 <p>PROBLEM TO BE SOLVED: To sense accurately the life of chemical filters by a device of simple structure and a small amount of work load. SOLUTION: In a filter unit in which chemical filters 9 are fitted on gas flow paths S1 , S2 and S3 formed by a casing 1, a sampling flow path 11 opened on the upstream of the chemical filters 9 on the gas flow paths S1 , S2 and S3 is provided in the casing 1, and a sampling filter containing ion exchange fibers is mounted removably on the sampling flow path 11.</p>
申请公布号 JPH09122435(A) 申请公布日期 1997.05.13
申请号 JP19950311600 申请日期 1995.11.06
申请人 EBARA CORP 发明人 ENDO NAOTOSHI;BESSHO NOBUYORI;SHIMA HIROYUKI;YAMAGUCHI MAKOTO
分类号 B01D53/34;B01D46/00;B01D53/81;(IPC1-7):B01D53/34 主分类号 B01D53/34
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