| 摘要 |
PROBLEM TO BE SOLVED: To minimize the number of pipe line parts in circulation system in which various external components are connected, the manhours for connection of pipe lines and reduce the space. SOLUTION: Pump elements are mounted on a circulation board having an outer surface along which a passage 1D connected to a fluid source, for feeding fluid to a fed object is formed. A pressure chamber 1A is formed in a surface where the fluid passage 1D is not formed, and a suction chamber 1B and a discharge chamber 1C are formed on the opposite surface of a substrate, being parted from the pressure chamber 1A by means of a partition wall, the suction chamber 1B and the discharge chamber 1C being connected to the supply source side and the fed object, respectively through the passage 1D. It is noted that the pump elements such as a check valve 2, a diaphragm 3, a first spring seat 4, a second spring seat 5, a compression spring 6, an arm 7, a ring spring 8, a lower plate 9, a drive cam 10, a cam shaft 11, an eccentric cam 12, a ball bearing 13 and a drive motor 14 are mounted, interposing the pressure chamber 1A, the suction chamber 1B and the discharge chamber 1C. |
