| 摘要 |
A calibration data transmission apparatus and method for a semiconductor test equipment is disclosed which is capable of decreasing the capacity of a memory for storing the calibration data and also reducing the time for transmitting the calibration data. The calibration data transmission apparatus includes a pin mode data memory which stores different types of calibration mode data for each test pin, a calibration file memory which stores calibration data each of which corresponds to each test pin and the calibration mode data, and a calibration flag circuit which detects a coincidence between the calibration data to be transmitted and the previous calibration data. In another aspect, the data transmission apparatus further includes a calibration transmission sequence part which controls a sequence of transmitting the calibration data, a pin counter which is controlled by the calibration transmission sequence part to generate the address data for the calibration file memory and a par-pin control part which controls the timing of incrementing the calibration file memory based on a signal from the calibration flag circuit showing a coincidence or non-coincidence of the present calibration data and the previous calibration data.
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