PROCESS OF MANUFACTURE OF SEMICONDUCTOR SENSITIVE ELEMENT

摘要

FIELD: analytic instrumentation, branches of science and technology where analysis of gas and liquid media is necessary. SUBSTANCE: increased reliability of sensitive element os obtained by enhanced stability of electrophysical parameters of sensitive element thanks to fixation of catalytic particles and their protection against oxidation or poisoning with corrosive immeasurable components and to improved selectivity due to decreased access of immeasurable components of mixtures to sensitive element. process involves successive deposition of thin semiconductor layer and layer of metal-catalyst on dielectric thermally stable substrate, deposition of dielectric layer made from material permeable only for measured component on surface of layer of metalcatalyst. EFFECT: increased reliability of sensitive element.