| 摘要 |
An imaging system operates at the diffraction limit of the optics to which it is connected and outputs a signal representative of a sample (S) lying in the sample plane (17). The system comprises a cathode ray tube (30), an optical lens system (10'), and a means for sensing (40). The cathode ray tube (30) comprises an electron gun (34) for generating an electron beam (35) in a raster pattern. The electron beam (35) is adapted to produce an illuminated spot (39a) that scans correspondingly in the raster pattern and wherein the spot (39a) is positioned in an object plane (26). The optical lens system (10') focuses in a diffraction limited manner, the object plane (26) on to the sample plane (17), such that the image of the spot (39b) is the smallest diffraction limited size as determined by the optical lens system (10').
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