ENHANCED VERTICAL THERMAL REACTOR SYSTEM,申请号EP19900911896-传众专利搜索

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发明名称	ENHANCED VERTICAL THERMAL REACTOR SYSTEM
摘要
申请公布号	EP0485461(B1)	申请公布日期	1997.05.07
申请号	EP19900911896	申请日期	1990.08.01
申请人	ASM VT, INC.	发明人	DEVILBISS, JOHN, J.;GLAZE, JAMES, A.;LUGOSI, STEVE;MCNAUGHTON, ALLEN, D.;OZARSKI, ROBERT, G.
分类号	F27B17/00;H01L21/00;H01L21/677;(IPC1-7):C23C16/46	主分类号	F27B17/00
代理机构		代理人
主权项
地址

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