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发明名称
Piezoelectric sensor
摘要
申请公布号
EP0594331(B1)
申请公布日期
1997.05.07
申请号
EP19930308001
申请日期
1993.10.07
申请人
OKI CERAMIC INDUSTRY CO., LTD.
发明人
SATO, TOSHIHIKO
分类号
G01L9/08;G01L23/22;H01L41/04;H01L41/113;H04R17/00;(IPC1-7):H01L41/113
主分类号
G01L9/08
代理机构
代理人
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