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发明名称
Herstellungsverfahren einer fotoelektrischen Vorrichtung aus hydriertem amorphem Silizium
摘要
申请公布号
DE69122914(T2)
申请公布日期
1997.05.07
申请号
DE1991622914T
申请日期
1991.06.12
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD., KADOMA, OSAKA, JP
发明人
KANBARA, TERUHISA, IKEDA-SHI, OSAKA 563, JP;KONDO, SHIGEO, HIRAKATA-SHI, OSAKA 573, JP
分类号
H01L31/0224;H01L31/105;H01L31/20;(IPC1-7):H01L31/022;H01L31/075;H01L31/037
主分类号
H01L31/0224
代理机构
代理人
主权项
地址
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