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发明名称
PROTECTIVE DIAPHRAGM FOR A SILICON PRESSURE SENSOR
摘要
申请公布号
EP0771415(A1)
申请公布日期
1997.05.07
申请号
EP19950924852
申请日期
1995.07.11
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
BAUER, PETER;FRIMBERGER, MANFRED;PFAU, LORENZ;DIRMEYER, JOSEF;EHRLER, GUENTER
分类号
G01L19/06;G01L9/00;(IPC1-7):G01L9/00
主分类号
G01L19/06
代理机构
代理人
主权项
地址
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