| 摘要 |
<p>A method for fabrication of a probe, comprising the steps of: (1) forming a structure wherein a contact part formed on one side of an insulating flexible substrate and a conductor formed on either side or inside of said flexible substrate are electrically continued, and (2) joining said flexible substrate and a frame rigid substrate capable of supporting the tension in the planar direction of said flexible substrate at the outer periphery thereof, by bonding them by lamination press after heating, or by heating after lamination press, thereby applying a planar tension to the flexible substrate enclosed by the rigid substrate. According to the present invention, a method for fabrication of a probe can be provided, which probe serving well for use at high temperatures, such as for burn-in test, with high contact reliability, and being superior in durability as a test tool.</p> |
