发明名称 |
Process for producing thin film, and optical instrument including the same |
摘要 |
A substrate 2 is autorotatably installed in a vacuum vessel 1 at an upper part thereof. MgF2 granules 3 as a film source material are put in a quartz pan 4 and mounted on a magnetron cathode 5. The magnetron cathode 5 is connected through a matching box 6 to a 13.56 MHz radio frequency power source 7. Cooling water 8 for holding the temperature of the magnetron cathode 5 constant flows on a lower face of the magnetron cathode 5. A side face of the vacuum vessel 1 is provided with gas introduction ports 9, 10 for introducing gas in the vacuum vessel 1. A shutter 11 is placed between the magnetron cathode 5 and the substrate 2. This structure provides a process enabling forming a thin film in a high speed by sputtering, especially, a process enabling forming a thin fluoride film free of light absorption in a high speed by sputtering. <IMAGE> |
申请公布号 |
EP0754777(A3) |
申请公布日期 |
1997.05.07 |
申请号 |
EP19960111254 |
申请日期 |
1996.07.12 |
申请人 |
OLYMPUS OPTICAL CO., LTD. |
发明人 |
KAWAMATA, KEN;MITAMURA, NOBUAKI |
分类号 |
G02B1/10;C23C14/06;C23C14/34;C23C14/35;C23C14/40;C30B25/06 |
主分类号 |
G02B1/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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