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发明名称
METHOD OF AND APPARATUS FOR MICROWAVE-PLASMA PRODUCTION
摘要
申请公布号
EP0771469(A1)
申请公布日期
1997.05.07
申请号
EP19950924446
申请日期
1995.07.11
申请人
EA TECHNOLOGY LIMITED
发明人
DUAN, XIAOMING
分类号
H05H1/46;C23C16/50;C23C16/511;C23F4/00;H01J37/32;H01L21/205;(IPC1-7):H01J37/32
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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