| 摘要 |
PROBLEM TO BE SOLVED: To provide an economical IC testing device for performing the binary search of a propagation delay time in parallel for every DUT. SOLUTION: Variable delay circuits DL2-1 and DL2-2 are provided for every DUT at a comparison timing delay circuit 11 and the weighting coefficient of delay data required for binary search set for each is given by binary search blocks BS1 and BS2 which are constituted of, for example, a logic gate. In the blocks, the weighting coefficient is increased only by 1/2<i-1> in one measurement if there is no change from Fail to Pass in (i-1)th measurement and is decreased by the same amount if the above change exists on the basis of Pass/ Fail signals S1 and S2 of the DUT's1 and 2. Arithmetic operators ALU2-1a and ALU2-2a calculate the delay data required for binary search from each initial delay data τ1 supplied from each control part 6 and the weighting coefficient, respectively. |
