FORMATION OF CONNECTING HOLE,申请号JP19950278007-传众专利搜索

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发明名称	FORMATION OF CONNECTING HOLE
摘要
申请公布号	JPH09120990(A)	申请公布日期	1997.05.06
申请号	JP19950278007	申请日期	1995.10.25
申请人	SONY CORP	发明人	NAGAYAMA TETSUJI
分类号	H01L21/28;H01L21/302;H01L21/3065;H01L21/768;H01L23/522;(IPC1-7):H01L21/768;H01L21/306	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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