Production of organically modified oxide, oxynitride or nitride coatings,申请号DE1995148160-传众专利搜索

发明名称	Production of organically modified oxide, oxynitride or nitride coatings
摘要	<p>Organically modified oxide and/or nitride coatings are produced continuous substrates (1) by high rate vaporisation of oxide forming reactive material (5) which passes through a high density plasma (6) as it mixes with oxygen and nitrogen fed from tubes (8,9) and gaseous monomer material fed from tubes (10,11).</p>
申请公布号	DE19548160(C1)	申请公布日期	1997.05.07
申请号	DE1995148160	申请日期	1995.12.22
申请人	FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V., 80636 MUENCHEN, DE	发明人	NEUMANN, MANFRED, DR., 01277 DRESDEN, DE;SCHILLER, SIEGFRIED, PROF. DR., 01324 DRESDEN, DE;MORGNER, HENRY, 01257 DRESDEN, DE;SCHILLER, NICOLAS, 01833 HELMSDORF, DE;STRAACH, STEFFEN, 01187 DRESDEN, DE
分类号	C23C14/00;C23C14/08;C23C14/32;(IPC1-7):C23C14/08	主分类号	C23C14/00
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