| 摘要 |
PROBLEM TO BE SOLVED: To detect rotary angular speed only in a detection element by coupling an oscillator through a resilient element with a detection element and providing the resilient element with low rigidity in the direction of X-axis while high rigidity in the direction of Y-axis. SOLUTION: An oscillation spring 2 is a U-shaped elongated flexible member and supports an evaluation element 3 with low rigidity in the direction of X-axis but high rigidity of the direction of Y-axis. The element 3 has a movable frame 4 to be coupled with the spring 2, and movable and fixed electrodes 5, 6. An oscillator 1 vibrates by being excited with a force in the direction of X-axis but since the rigidity of spring 2 is low, the vibration is scarcely transmitted to the frame 4. When a sensor turns around Z-axis, Coriolis force is generated in the direction of Y-axis normal to the direction of vibration and the frame 4 is deformed through the spring 2. Consequently, the interval between electrodes 5, 6 is varied and the displacement of frame 4, i.e., the rotation around the Z-axis, can be detected by measuring the capacitance between them. In this regard, the manufacturing error substantially has no effect on the signal from the element 3. |
