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发明名称
MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH09120953(A)
申请公布日期
1997.05.06
申请号
JP19950277320
申请日期
1995.10.25
申请人
NEC CORP
发明人
SATOU MASAYUKI
分类号
H01L21/28;H01L21/302;H01L21/3065;H01L21/3213;(IPC1-7):H01L21/306;H01L21/321
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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