| 摘要 |
PROBLEM TO BE SOLVED: To control the position of a moving body with high accuracy at a high speed by providing a band damping filter and mainly damping the signal component in the same band as that of the natural frequencies of the moving body, armature coils arranged on a stator, etc., from control signals or magnetic pole detecting signals. SOLUTION: An encoder section 24 recognizes the position of a moving body 6 based on a signal from a position reading-out section 22 provided on a moving body 6 which is constituted as the mover of a mobile coil type linear motor 2. A magnetic pole detecting section (Hall element) 18 detects the magnetic pole of a field magnet. A control section 26 finds a control signal based on a position signal and position command signal from an encoder section 24. A driving section 44 forms a driving current supplied to armature coils 14a-1c based on the control signal of the control section 26 and a magnetic pole detecting signal from the detecting section 18. A band damping filter section 42 damps the signal component in a frequency band which is substantially equal to the natural frequency of the motor 2 from the control signal and magnetic pole detecting signal. |
