Method and apparatus for device simulation

摘要

In a method and apparatus for device simulation, a correct impact ionization coefficient is calculated from a distribution function by solving Boltzmann transport equation, impact ionization coefficients are calculated by using all candidates of methods of calculating impact ionization coefficients, one of the candidates of methods of calculation capable of providing impact ionization coefficient which can best approximate the correct impact ionization coefficient obtained from the distribution function by solving Boltzmann transport equation is selected, and thereafter, impact ionization coefficients are calculated by using the selected method.