发明名称 |
Hollow cathode array and method of cleaning sheet stock therewith |
摘要 |
An array of hollow cathodes can be made by mounting a housing connected to a source of plasma precursor gas and to a source of power in a vacuum chamber, said housing having a plurality of uniformly spaced openings in a wall thereof into which a plasma can be generated. A substrate to be treated is mounted parallel to and spaced a preselected distance from said openings. In operation, a plurality of plasma torches is created extending from the openings which can plasma etch and remove coatings on said substrate.
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申请公布号 |
US5627435(A) |
申请公布日期 |
1997.05.06 |
申请号 |
US19960601888 |
申请日期 |
1996.02.15 |
申请人 |
THE BOC GROUP, INC. |
发明人 |
JANSEN, FRANK;KROMMENHOEK, STEVEN K.;BELKIND, ABRAHAM I.;ORBAN, JR., ZOLTAN |
分类号 |
C23C16/50;C23G5/00;H01J37/32;H01L21/302;H01L21/3065;H05H1/24;(IPC1-7):H01P5/12 |
主分类号 |
C23C16/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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