| 摘要 |
PROBLEM TO BE SOLVED: To measure an element concentration distribution in the film thickness (three-dimensional) direction of a sample while maintaining a high space resolution in the direction inside the surface of the sample. SOLUTION: While characteristic X rays 5 generated from a sample 1 by applying electrons 4 are detected by an EDX detector 2 and the concentration signal of an element is generated, electrons which pass through the sample are detected by an EELS detector 3 and the concentration signal of the element is generated from electron energy-loss spectrum. Then, by calculating the two concentration signals, the element concentration distribution in the film thickness direction of the sample 1 is obtained. |
