发明名称 CONTRAST ADJUSTING METHOD IN SCANNING ELECTRON MICROSCOPE, AND SCANNING ELECTRON MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To set contrast in a desired value in a short time. SOLUTION: Multiplication voltages to be impressed from a power source 10 are defined as 1V, 2V, and contrast values C1 and C2 at this time are respectively detected by a contrast value detecting circuit 15. These contrast values C1 and C2 are supplied to an operation circuit 18, and the following operation is performed. [α=ln(C1/C2)/ln(V1/V2)]. In actual automatic contrast adjusting operation, a preset value calculating circuit 16 performs operation on voltage necessary to make contrast coincide with a desired value by a supplied contrast value, photoelectron multiplying voltage impressed on a photomultiplier 8 from the power source 10 and anαvalue from operation circuit 18.
申请公布号 JPH09115472(A) 申请公布日期 1997.05.02
申请号 JP19950269775 申请日期 1995.10.18
申请人 JEOL LTD 发明人 FUTAMURA YOSHIHIKO
分类号 H01J37/22;H01J37/244;(IPC1-7):H01J37/22 主分类号 H01J37/22
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