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发明名称
Verfahren und Einrichtung zum Messen, Kontaktieren und Aufsockeln von Halbleiterkoerpern
摘要
申请公布号
DE1193608(B)
申请公布日期
1965.05.26
申请号
DE1961J020045
申请日期
1961.06.08
申请人
INTERMETALL GESELLSCHAFT FUER METALLURGIE;ELEKTRONIK M.B.H.
发明人
KLEINKNECHT DR. HANS-PETER
分类号
H01L21/00;H01L21/60
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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