OPTICAL HETERODYNE TYPE DISPLACEMENT AMOUNT DETECTION DEVICE,申请号JP19950292008-传众专利搜索

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发明名称	OPTICAL HETERODYNE TYPE DISPLACEMENT AMOUNT DETECTION DEVICE
摘要
申请公布号	JPH09113217(A)	申请公布日期	1997.05.02
申请号	JP19950292008	申请日期	1995.10.13
申请人	HOYA CORP	发明人	HIRANO MASAO
分类号	G01B9/02;G01B11/00;(IPC1-7):G01B11/00	主分类号	G01B9/02
代理机构		代理人
主权项
地址

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