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发明名称
TILTING DEVICE
摘要
申请公布号
JPH09115691(A)
申请公布日期
1997.05.02
申请号
JP19950265956
申请日期
1995.10.13
申请人
NIKON CORP
发明人
SHIODA TAMOTSU;EBI MASAMI;SHIBATA NORIO;TAKINO HIDEO;ITO HIROSHI
分类号
H05H1/46;B23K10/00;B23K37/047;B24B19/00;B24B41/04;F16H13/00;H01L21/302;H01L21/304;(IPC1-7):H05H1/46
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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